Technical Description
This invention relates to an optical device and method for in situ sub-nanometers thickness and inter-diffusive measurement using etched fiber Bragg Grating Sensors.
Problems Addressed
- Lacks Precision
- Inefficient Scaling
- Limited Sensitivity
- Destructive Methods
- Unreliable Accuracy
Tech Features
- Efficient Sub Nanometer Detection
- Enhanced Sensitivity Sensors
- Better Inter Diffusion Analysis
- Improved Film Monitoring
- Real-time Measurement
Target Audience
- Semiconductor Fabrication & Nanomanufacturing Industries
- Healthcare Diagnostics & Medical Device Companies
- Advanced Material Science & Polymer Industries
- Optical Sensor & Photonics Technology Companies
- Research & Development
Tech ID: P13-1648 TRL 4 Patent Status: Published Available For Exclusive and Non-exclusive License
