Technical Description
An RF MEMS capacitive shunt switch architecture that enables discrete tuning of resonant frequency using multiple floating metal pads along a coplanar waveguide structure. The design integrates thermal and buckling actuators with a push‑pull beam to reposition the contact arm over different stationary MIM capacitors, achieving multi‑band operation without continuous DC hold power.
Problems Addressed
- Resonant Drift
- Contact Non Uniformity
- Capacitance Inaccuracy
- High OFF Power
- Limited Frequency Agility
- Complex Tuning Mechanisms
Tech Features
- Multiple Floating Metals
- Stationary MIM Capacitor
- Lateral Thermal Actuator
- Push‑Pull Contact Beam
- Buckling Lock Actuator
- Position‑Based Frequency Tuning
Target Audience
- Telecom Equipment Manufacturers
- Aerospace Defense Contractors
- Automotive RF Integrators
- Test Equipment Providers
- Research & Development
Tech ID: P13-1838 TRL 4 Patent Status: Granted Available For Exclusive and Non-exclusive License
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P13-1838
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